Equipment

• Lithography / Patterning Tools
  • Karl Suss MA6 Mask Aligner
  • Karl Suss MJB 3 Mask Aligner
  • Hot Plate
  • Spin Coater
  • Laser MicroMachining System
  • Optical Microscope
• Deposition Tools
  • Atomic Layer Deposition System
  • Ink-Jet Deposition System
  • PVD 75 Electron Beam Deposition System
  • PVD 75 Sputtering Deposition System
  • Thermal Evaporator
• Etching Tools
  • Trion phantom III RIE etcher
  • Trion Sirus T2 TableTop RIE etcher
• Metrology Tools
  • M-2000V Spectroscopic Ellipsometer
  • Microscope System with Fast CCD Camera
  • PHE101 Discrete Wavelength Ellipsometer
  • Profilometer
  • XGT-5000 X-ray Analytical Microscope
  • Zetasizer Nano ZS analyzer
• Biology Tools
  • Bio Hood
  • CO2 Incubator
  • Incubator Shaker
  • Refrigerator
• Other Processing Tools
  • Plasma Cleaner
  • Wire Bonder
• Equipment Map