The University of Georgia

NanoSEC

Nanoscale Science and Engineering Center

Header Image
  • About
  • Cleanroom
    • Policy
    • Safety
    • Equipment
      • Lithography / Patterning Tools
        • Karl Suss MA6 Mask Aligner
        • Spin Coater
        • Laser MicroMachining System
        • Optical Microscope
        • Hot Plate
      • Deposition Tools
        • Ink-Jet Deposition System
        • PVD 75 Sputtering Deposition System
        • PVD 75 Electron Beam Deposition System
        • Atomic Layer Deposition System
        • Thermal Evaporator
      • Etching Tools
        • Trion phantom III RIE etcher
        • Trion Sirus T2 TableTop RIE etcher
      • Metrology Tools
        • M-2000V Spectroscopic Ellipsometer
        • XGT-5000 X-ray Analytical Microscope
        • Microscope System with Fast CCD Camera
        • PHE101 Discrete Wavelength Ellipsometer
        • Profilometer
        • Zetasizer Nano ZS analyzer
      • Other Processing Tools
        • Plasma Cleaner
        • Wire Bonder
      • Equipment Map
    • Scheduling
    • Resources
    • Sponsors
    • Contact
  • Related Facilities
  • Members
    • Membership Directory
    • Apply for Membership
  • Units
  • Resources
  • Publications
    • 2012 Publications
    • 2011 Publications
    • 2010 Publications
    • 2009 Publications
    • 2008 Publications
    • 2007 Publications
  • Opportunities
    • Funding
  • NanoFun

Deposition Tools

  • Atomic Layer Deposition System
  • Ink-Jet Deposition System
  • PVD 75 Electron Beam Deposition System
  • PVD 75 Sputtering Deposition System
  • Thermal Evaporator

OVPR logo

Nanoscale Science and Engineering Center
The University of Georgia
Athens GA 30602
Web Contact

Research

  • Office of the Vice President for Research
  • Sponsored Programs
  • Centers & Institutes
  • UGA Research Blog
  • Research Newsletter

About UGA

  • Visit UGA
  • Campus Maps
  • Master Calendar
  • Athletic Association
  • Employment

Academics

  • MyUGA
  • Oasis
  • ELC
  • UGA Bulletin
  • Academic Calendars

Student Life

  • UGA Mail
  • Food Services
  • Campus Life
  • Recreational Sports
  • Student Account

Helpful Links

  • Financial Aid
  • International Education
  • Honors Program
  • Library
© The University of Georgia