PVD 75 Electron Beam Deposition System

The PVD 75 is versatile system that can be used for a variety of thin film deposition applications. The Electron beam Evaporation has the following features:

  • Telemark 4 Pocket E-Gun
  • 5.5 kW Power Supply
  • Source Shutter

It is used mainly for metal deposition, such as Al, Cu, Ti, etc (no Au or Ag is allowed).