PVD 75 Sputtering Deposition System

Kurt J. Lesker Company’s PVD 75 is a customizable evaporation system.  The magnetron sputtering module installed in the following instrument is used to deposit oxide layers (SiO2, TiO2, and ZnO).  Argon plasma is generated with a radio frequency (RF) source.  The resulting ions bombard oxide targets ejecting atomic oxides, which are deposited onto the desired substrate.