The University of Georgia

NanoSEC

Nanoscale Science and Engineering Center

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  • About
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      • Lithography / Patterning Tools
        • Karl Suss MA6 Mask Aligner
        • Spin Coater
        • Laser MicroMachining System
        • Optical Microscope
        • Hot Plate
      • Deposition Tools
        • Ink-Jet Deposition System
        • PVD 75 Sputtering Deposition System
        • PVD 75 Electron Beam Deposition System
        • Atomic Layer Deposition System
        • Thermal Evaporator
      • Etching Tools
        • Trion phantom III RIE etcher
        • Trion Sirus T2 TableTop RIE etcher
      • Metrology Tools
        • M-2000V Spectroscopic Ellipsometer
        • XGT-5000 X-ray Analytical Microscope
        • Microscope System with Fast CCD Camera
        • PHE101 Discrete Wavelength Ellipsometer
        • Profilometer
        • Zetasizer Nano ZS analyzer
      • Other Processing Tools
        • Plasma Cleaner
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Lithography / Patterning Tools

  • Karl Suss MA6 Mask Aligner
  • Karl Suss MJB 3 Mask Aligner
  • Hot Plate
  • Spin Coater
  • Laser MicroMachining System
  • Optical Microscope

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Nanoscale Science and Engineering Center
The University of Georgia
Athens GA 30602
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