The University of Georgia
NanoSEC
Nanoscale Science and Engineering Center
About
Cleanroom
Policy
Safety
Equipment
Lithography / Patterning Tools
Karl Suss MA6 Mask Aligner
Spin Coater
Laser MicroMachining System
Optical Microscope
Hot Plate
Deposition Tools
Ink-Jet Deposition System
PVD 75 Sputtering Deposition System
PVD 75 Electron Beam Deposition System
Atomic Layer Deposition System
Thermal Evaporator
Etching Tools
Trion phantom III RIE etcher
Trion Sirus T2 TableTop RIE etcher
Metrology Tools
M-2000V Spectroscopic Ellipsometer
XGT-5000 X-ray Analytical Microscope
Microscope System with Fast CCD Camera
PHE101 Discrete Wavelength Ellipsometer
Profilometer
Zetasizer Nano ZS analyzer
Other Processing Tools
Plasma Cleaner
Wire Bonder
Equipment Map
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Units
Resources
Publications
2012 Publications
2011 Publications
2010 Publications
2009 Publications
2008 Publications
2007 Publications
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NanoFun
Optical Microscope
For wafer inspection.
