The University of Georgia

NanoSEC

Nanoscale Science and Engineering Center

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  • About
  • Cleanroom
    • Policy
    • Safety
    • Equipment
      • Lithography / Patterning Tools
        • Karl Suss MA6 Mask Aligner
        • Spin Coater
        • Laser MicroMachining System
        • Optical Microscope
        • Hot Plate
      • Deposition Tools
        • Ink-Jet Deposition System
        • PVD 75 Sputtering Deposition System
        • PVD 75 Electron Beam Deposition System
        • Atomic Layer Deposition System
        • Thermal Evaporator
      • Etching Tools
        • Trion phantom III RIE etcher
        • Trion Sirus T2 TableTop RIE etcher
      • Metrology Tools
        • M-2000V Spectroscopic Ellipsometer
        • XGT-5000 X-ray Analytical Microscope
        • Microscope System with Fast CCD Camera
        • PHE101 Discrete Wavelength Ellipsometer
        • Profilometer
        • Zetasizer Nano ZS analyzer
      • Other Processing Tools
        • Plasma Cleaner
        • Wire Bonder
      • Equipment Map
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  • Publications
    • 2012 Publications
    • 2011 Publications
    • 2010 Publications
    • 2009 Publications
    • 2008 Publications
    • 2007 Publications
  • Opportunities
    • Funding
  • NanoFun

Units

NanoSEC-Related Colleges & Departments

  • College of Agricultural and Environmental Sciences
    • Biological & Agricultural Engineering
    • Food Science & Technology
    • Crop & Soil Sciences
    • Animal & Dairy Science
  • College of Pharmacy
    • Pharmaceutical & Biomedical Sciences
  • College of Public Health
    • Environmental Health Science
  • College of Veterinary Medicine
    • Infectious Diseases
    • Pathology
    • Physiology and Pharmacology
  • Franklin College of Arts and Sciences
    • Physics and Astronomy
    • Chemistry
    • Cellular Biology
    • Biochemistry & Molecular Biology
    • Microbiology

Associated Centers & Research Units

  • Animal Health Research Center (AHRC)
  • Biomedical and Health Sciences Institute (BHSI)
  • Bioenergy Systems Research Institute (BSRI)
  • Center for Food Safety
  • Center for Simulational Physics
  • Center for Tropical and Emerging Global Diseases
  • Complex Carbohydrate Research Center (CCRC)
  • Faculty of Engineering
  • Faculty of Infectious Diseases
  • Savannah River Ecology Laboratory
  • University of Georgia Cancer Center

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Nanoscale Science and Engineering Center
The University of Georgia
Athens GA 30602
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